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MT350 Series Wafer Laser Resistor Trimming Machine | High Precision for Wafer-Level Devices

Product

MT350 Series Wafer Laser Resistor Trimming Machine | High Precision for Wafer-Level Devices

High-precision laser trimming solution for semiconductor wafers, compatible with multiple sizes (4", 6", 8", etc.). Features include vision recognition, full wafer preview, automated handling, and precise resistance adjustment (≤±0.3%) using a 355nm laser source. Enhanced with high-speed scanning and GBIP interface for extended functionality, it ensures exceptional accuracy and efficiency.

    Equipment Features

    ▪ Proprietary software with user-friendly interface and easy operation.
    ▪ Equipped with a wafer preview function.
    ▪ Supports the import and export of processing plans, facilitating the handling of different product models.
    ▪ Provides processing data recording to meet quality control and data analysis needs.
    ▪ Flexible and easy-to-use custom programming features for personalized adjustments, with options for saving, retrieving, and modifying, significantly enhancing mass production efficiency.
    ▪ The software supports visual recognition, XY alignment, angle detection, and automatic platform focus adjustment.
    ▪ Supports distance and angle measurement functions.
    ▪ Enables remote functionality, compatible with MES systems or other equipment for integration.
    ▪ Equipped with coaxial vision alignment for improved processing precision and operational convenience.
    ▪ Features off-axis vision with support for motorized zoom adjustment.
    ▪ Integrated automatic loading and unloading mechanism for automated production.

    Specifications

    Laser Wavelength 355 nm
    Minimum Spot Size 5 μm
    Galvanometer Scanning Speed 0-8000 mm/s
    Galvanometer Repeatability ±1 μm
    Motion mechanism
    XY module repeat positioning accuracy <±1μm
    Rotary table repeat positioning accuracy ±2.5″
    Lifting platform repeat positioning accuracy <±1μm

    Wafer-specific automatic loading and unloading mechanism

    Measurement system

    Resistance adjustment range 10Ω–1MΩ
    Resistance adjustment accuracy <±0.3%
    Standard configuration 24 measurement channels

    Power requirements

    Equipment power supply 220V, 50Hz (single-phase)
    Air supply pressure 0.4–0.6 Mpa
    Ambient temperature 24±4°C; air-conditioned constant temperature

    Product Pictures

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    MT350 Series Wafer Laser Resistor Trimming Machine High Precision for Wafer-Level Devices_5
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